<圖片來源>http://streetwill.co/
如題:
小編由於最近公司需求要將公司的內容儘速整理完成,會以Blogger的方式,將相關內容趕快放上來,也當小編最近工作的小小心得,若有相關錯誤在跟我告知一下,感謝~
寫在前頭:
一般在工程師在撰寫Steam function會採取一問一答的方式
基本上For example, EAP(Equipment Automation Process)會與EQP(Equipment)詢問
而機台若符合SECS標準則會回傳對應資料,如下方圖片所示
Stream列別
Stream | 中文 | 英文 |
Stream1 | 設備狀態 | Equipment Status |
Steram2 | 設備控制與診斷 | Equipment Control and Diagnostics |
Stream3 | 材料狀態 | Material Status |
Steram4 | 材料控制 | Material Control |
Steram5 | 例外處理 | Excepetion Handling |
Steram6 | 資料收集 | Data Collection |
Steram7 | 流程程式管理 | Process Program Management |
Steram8 | 控制程式傳輸 | Control Program Transfer |
Steram9 | 系統錯誤 | System Errors |
Steram10 | 終端機服務 | Terminal Services |
Stream11 | 主機檔案服務 | Host File Services |
Stream12 | 晶圓定位 | Wafer Mapping |
Stream13 | 資料組傳輸 | Data Set Transfers |
Stream14 | 物件服務 | Object Services |
Stream15 | 配方管理 | Recipe Management |
Stream16 | 製程管理 | Processing Management |
Steram17 | 子系統控制與診斷 | Subsystem Control and Data |
常用的Stream Function列表:(這不是全部只有部分目前for EAP常用)
Stream Function | Function Detail |
S1F1 | Are You There? |
S1F2 | On Line Data |
S1F3 | Selected Equipment Status Request |
S1F4 | Selected Equipment Status Data |
S1F13 | Establish Communications Request |
S1F14 | Establish Communications Request Acknowledge |
S1F15 | Request OFF-LINE |
S1F16 | OFF-LINE Acknowledge |
S1F17 | Request ON-LINE |
S1F18 | ON-LINE Acknowledge |
S2F13 | Equipment Constant Request |
S2F14 | Equipment Constant Data |
S2F15 | New Equipment Constant Send |
S2F16 | New Equipment Constant Ack |
S2F17 | Date and Time Request |
S2F18 | Date and Time Data |
S2F23 | Trace Initialize Send |
S2F24 | Trace Initialize Acknowledge |
S2F33 | Define Report |
S2F34 | Define Report Acknowledge |
S2F35 | Link Event Report |
S2F36 | Link Event Report Acknowledge |
S2F37 | Enable/Disable Event Report |
S2F38 | Enable/Disable Event Report Acknowledge |
S2F41 | Host Command Send |
S2F42 | Host Command Acknowledge |
S3F17 | Carrier Action Request |
S3F18 | Carrier Action Ack |
S5F1 | Alarm Report Send |
S5F2 | Alarm Report Ack |
S6F5 | Multi-block Data Send Inquire |
S6F6 | Multi-block Grant |
S6F11 | Event Report Send |
S6F12 | Event Report Ack |
S7F1 | Process Program Load Inquire |
S7F2 | Process Program Load Grant |
S7F17 | Delete Process Program Send |
S7F18 | Delete Process Program Acknowledge |
S7F19 | Current Process Program Dir Request |
S7F20 | Current Process Program Data |
S7F23 | Formatted Process Program Send |
S7F24 | Formatted Process Program Acknowledge |
S7F25 | Formatted Process Program Request |
S7F26 | Formatted Process Program Data |
S10F3 | Terminal Display, Single |
S10F4 | Terminal Display, Single Acknowledge |
S14F1 | Get Attributes |
S14F2 | Attribute Data |
S14F9 | Create Obj Request |
S14F10 | Create Obj Ack |
S14F11 | Delete Obj Request |
S14F12 | Delete Obj Ack |
S16F5 | Process Job Cmd Req |
S16F6 | Process Job Cmd Ack |
S16F11 | PRJobCreateEnh |
S16F12 | PRJobCreateEnh Ack |
S16F17 | PRJobDequeue |
S16F18 | PRJobDequeue Ack |
S16F19 | PRJob List Req |
S16F20 | PRJob List Data |
S16F27 | Control Job Command |
S16F28 | Control Job Command Ack |
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